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Y2O3 COATING TechnologyIt's the Y2O3 coating technology on Quartz surface.
The coating thin film, Y2O3 is transparent.
With this coating film,
it is possible to protect Quartz surface from Plasma Damage & Plasma Attack.
Fig. Cross-Sectional view of Y2O3 coating Fig. Plasma etched (a) Y2O3 and (b) quartz glass on quartz glass substrate.
Fig. SIMS analysis results for Y2O3
Fig. Performances of Y2O3 coating
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